研究目的
To propose a method for the accurate measurement of the remnant polarisation charge of ferroelectric films at the nanoscale using an atomic force microscope with a capacitive correction to extract the signal from the noise.
研究成果
The nano-PUND method successfully measures the remnant polarisation charge of ferroelectric films at the nanoscale, with a measured charge of 4.2 fC on a PZT thin film. The method can be further improved by implementing resistive corrections and reducing stray capacitance.
研究不足
The method's effectiveness is limited by the noise level, which can obscure the signal. Improvements such as resistive correction and decreasing the total capacitance of the AFM system are suggested to enhance the method's accuracy.
