研究目的
To develop a simple and universal printing method for fabrication of conductive patterns and hybrid structures at ambient temperature with high electrical conductivity, desirable resolution, and the potential of realizing single-tool device fabrication.
研究成果
The room-temperature, visible-light projection lithography technique for fabricating highly electrically conductive Ag patterns on various substrates simplifies the metal-patterning processes, avoids high processing temperature, expensive equipment, and harsh experimental conditions, and shows potential for fabricating microelectronics with one system.
研究不足
The technique may require optimization for higher resolution printing and scalability for industrial applications.
1:Experimental Design and Method Selection:
Utilizes visible-light-based photolithography under room temperature from a particle-free solution.
2:Sample Selection and Data Sources:
Various substrates including polyethylene terephthalate, polydimethylsiloxane, polyimide, Scotch tape, print paper, Si wafer, glass coverslip, and polystyrene.
3:List of Experimental Equipment and Materials:
Commercial projector, optical convex lens, reflective mirror, moveable stage, particle-free reactive silver ink.
4:Experimental Procedures and Operational Workflow:
Projection of patterned light through a digital mask on a substrate immersed in the photoreactive silver ink, followed by chemical annealing with a NaCl aqueous solution.
5:Data Analysis Methods:
Electrical conductivity measurement, SEM imaging, UV–vis absorption spectra analysis.
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