研究目的
To present a cost-effective design of a micro-thermoelectric generator (μTEG) based on PolyMUMPs process, verified through 3-D numerical simulation.
研究成果
The design of PolyMUMPs process based μTEG is a very low-cost standard fabrication technology compared to CMOS-μTEG, CMOS-MEMs-μTEG, or customer-μTEG. The simulation results show a matched output power per unit area of 16.56 μW/1cm2 with a 1.3 K temperature difference across the μTEG. Future work will focus on fabricating the μTEG to validate the simulation results.
研究不足
The study is based on simulation results, and actual fabrication and testing are needed to validate the accuracy of the simulation results.
1：Experimental Design and Method Selection:
A 3-D numerical simulation model was designed to verify the performance of the PolyMUMPs based μTEG. The model was tested against published experimental results.
2：Sample Selection and Data Sources:
The simulation model was verified with data from previous work by another author.
3：List of Experimental Equipment and Materials:
The design utilized PolyMUMPs process layers including three poly-silicon layers, two oxide layers, silicon nitride, and metal (gold) on a silicon substrate.
4：Experimental Procedures and Operational Workflow:
The simulation involved calculating the optimal dimensions for thermoelectric couples to achieve maximum output power, considering the effect of metal ceramic interface.
5：Data Analysis Methods:
COMSOL Multiphysics was used for finite element modeling to calculate optimal dimensions and study the effect of thermal resistance.
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