研究目的

Developing the deeper potential of 2D TMDCs demands fine spatial modulation of chemical compositions and electrical performance to produce desired heterostructures.

研究成果

In summary, we have fabricated a series of compositionally tunable WS2-Mo1-xWxS2 vertical heterostructures on Si/SiO2 substrates through a combination strategy of magnetron sputtering and CVD. By manipulating the stacking sequence of Mo/W films as the precursors, the W composition in alloyed Mo1-xWxS2 flake can be adjusted in different composition ranges. Diverse characterization techniques, such as optical microscope, AFM, Raman, PL, and Raman and PL mappings, are employed to systematically confirm the microstructure and optical performance of the various structures. The possible mechanism of these heterostructures with different composition ranges is proposed based on the tunable Mo/W ratio in the vapor via manipulating the stacking forms of Mo and W films. The growth strategy in this work appears to be a feasible technique that could be extended to synthesize other vertically stacked or laterally stitched heterostructures composing of various TMDCs or TMDC and IVA-VIA semiconductors, and these materials in turn can present unique physical properties and provide exciting opportunities for the development of high-performance functional electronics and optoelectronics.

研究不足

The technical and application constraints of the experiments, as well as potential areas for optimization, are not explicitly mentioned in the paper.