研究目的
Investigating the synthesis of large-area single-layer graphene sheets using C2H2 chemical vapor deposition and their electronic properties and strain sensitivity.
研究成果
The study successfully synthesized large-area single-layer graphene with controlled grain size using C2H2 chemical vapor deposition. The nucleation density was found to significantly affect the electronic properties of graphene. A gauge factor of 3.4 was achieved for graphene-based strain sensors under tensile deformation, demonstrating their potential for strain sensing applications.
研究不足
The high reactivity of C2H2 makes it difficult to control the nucleation density and grain size of graphene. The strain sensitivity measurement is limited to uniaxial tensile strain.
1:Experimental Design and Method Selection:
Synthesis of graphene using C2H2 chemical vapor deposition on Cu foils, fabrication of graphene-based FETs and strain sensors.
2:Sample Selection and Data Sources:
Cu foils (Nilaco CU-113263, 50μm-thick,
3:9%) served as the catalyst. List of Experimental Equipment and Materials:
LPCVD apparatus (ULVAC QH-P610CP), polymethyl methacrylate (PMMA) resist (Microchem PMMA 950K A2, 2% in anisole), FeCl3 etchant, HCl solution, deionized water.
4:Experimental Procedures and Operational Workflow:
Cleaning of Cu foils, folding into pockets, thermal annealing, graphene growth, transfer to SiO2/Si substrate, fabrication of FETs and strain sensors, measurement of electronic properties and strain sensitivity.
5:Data Analysis Methods:
Raman spectroscopy (Jasco NRS-5100), semiconductor parameter analyzer (Agilent 4155C), source-measure unit (Yokogawa GS610).
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