研究目的
Investigating the potential of CMOS nanowire biosensing systems to improve healthcare accessibility and lower medical diagnostics costs through miniaturized electronic sensors.
研究成果
CMOS nanowire sensors show great potential for future applications due to their simple, low-cost wafer level fabrication, label-free sensing at room temperature, high specificity, and sensitivity. They are capable of early and fast biomedical detection, including biomarker detection from unprocessed samples like whole blood.
研究不足
Challenges include system integration with fluid delivery methods, packaging, and the need for sample processing. The Debye length limitation in high ionic solutions affects sensor performance.
1：Experimental Design and Method Selection:
The study utilizes CMOS-compatible silicon nanowire sensors fabricated using top-down standard microelectronic fabrication processes.
2：Sample Selection and Data Sources:
The research focuses on the fabrication and testing of nanowire field-effect transistors (NWFETs) for biosensing applications.
3：List of Experimental Equipment and Materials:
Includes SOI wafers, electron beam lithography, optical lithography, reactive ion etching (RIE), and tetramethylammonium hydroxide (TMAH) for etching.
4：Experimental Procedures and Operational Workflow:
Detailed steps involve wafer oxidation, mesa definition, back gate and alignment marks definition, ion implantation, and metallization.
5：Data Analysis Methods:
The study analyzes the sensor response through changes in drain current, utilizing device transconductance for signal normalization.
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