摘要： Transparent electrochemical energy storage devices have attracted extensive attention for the power supply of next-generation transparent electronics. In this paper, semi-transparent thin film batteries (TFBs) with a grid-structured design have been fabricated on glass substrates using specific photolithography and etching processes in order to achieve LiCoO2/LiPON/Si structures below human eye resolution. UV-vis transmittance up to 60% have been measured for the obtained TFBs. Discharge capacity as high as 0.15 mAh has been recorded upon galvanostatic cycling at C/2 rate within 4.2-3 V voltage range for the highest transmittances. The capacity variation trend exhibits an initial phase of a gradual decrease with an average capacity loss of 0.15% per cycle, and thereafter a second phase with almost stable capacity. Particular attention has been given to the effects of architecture parameters on the TFB optical and electrochemical properties. To the best of our knowledge, this work is the first demonstration of transparent, all inorganic, thin film lithium-ion batteries. While reported studies are limited to battery structures involving liquid or polymer materials, our devices will contribute to improve form factor freedom, extend operating ranges, enhance long-term stability, and will be relevant to the integration into various optoelectronic devices.