摘要： Free space optical coupling is considered the important feature which affects on the performance of the optical systems. Where coupling elements such as lenses and mirrors are aided in overcome the divergence of the Gaussian beams and to achieve phase matching. Here we concentrate on the studying of the free space coupling of 3D (spherical) mirror based on the propagation of a Gaussian beam. The design and fabrication of 3D mirror in the Optical microelectromechanical systems (MEMS) are studied. The coupling efficiency is a very important factor in the design of any MEMS circuit. High coupling efficiency is obtained by assembling optical parts which increase the integration effort. In this work, we report a high coupling efficiency, monolithically integrated 3D silicon micromirror that is capable of influencing on the Gaussian beams which propagate in the plane of the silicon substrate. A micromachining method is presented for fabricating the 3D micromirror.