研究目的
To describe the role of various operational parameters used during microscopy in the SEM and their effect on contrast, resolution, and depth of field depicted by images, and to provide guidelines for operation and upkeep of the SEM instrument.
研究成果
The SEM is a powerful tool for imaging microstructural features of materials in significant detail. High-resolution microscopy and examination of difficult samples require experience and know-how of the principles of image formation in the SEM. The chapter provides guidelines for operation and upkeep of the SEM instrument to achieve high-quality images.
研究不足
The chapter mentions that the attainable resolution is not an instrument constant and can vary with specimen and application. High-resolution capability might be able to spatially resolve two features, but poor signal-to-noise ratio may not provide sufficient contrast necessary to examine the topography of the specimen.
