研究目的
To demonstrate the utility of piezoelectric force microscopy (PFM) for failure analysis of a multilayered ceramic capacitor (MLCC) by characterizing its cross section, identifying discontinuities, and measuring domain properties such as coercive voltage.
研究成果
Lateral piezoelectric force microscopy (LPFM) effectively characterized the MLCC cross section, identifying piezoelectric domains, distinguishing electrodes from dielectrics, and revealing discontinuities that compromise device performance. Spectroscopy provided quantitative measurements of coercive voltage and hysteresis, enabling nanoscale analysis of electromechanical properties and structure-property relationships for applications in failure analysis.
研究不足
Limitations include crosstalk between vertical and lateral signals due to cantilever geometry, underestimation of lateral tip displacement compared to surface displacement due to effects like friction, and potential artifacts from external contributions such as capacitive interactions.
1：Experimental Design and Method Selection:
The experiment used lateral piezoelectric force microscopy (LPFM) to analyze a cross section of a multilayered ceramic capacitor (MLCC) for failure analysis, focusing on electromechanical response and polarization direction.
2：Sample Selection and Data Sources:
A cross section of an MLCC was prepared and analyzed, with data acquired from imaging and spectroscopy.
3：List of Experimental Equipment and Materials:
Park NX20 AFM, NANOSENSORSTM PointProbe? Plus-Electrostatic Force Microscopy (PPP-EFM) cantilever (nominal spring constant k = 2.8 N/m, resonant frequency f = 25 kHz, coated with PtIr5, nominal radius of curvature 25 nm).
4：8 N/m, resonant frequency f = 25 kHz, coated with PtIr5, nominal radius of curvature 25 nm).
Experimental Procedures and Operational Workflow:
4. Experimental Procedures and Operational Workflow: The AFM tip was biased with 2V AC, no external bias applied to the sample; scan rate of 0.2 Hz was used for LPFM signal acquisition; imaging and spectroscopy were performed to capture topography, amplitude, and phase signals.
5：2 Hz was used for LPFM signal acquisition; imaging and spectroscopy were performed to capture topography, amplitude, and phase signals.
Data Analysis Methods:
5. Data Analysis Methods: Data analysis involved correlative imaging to identify discontinuities and spectroscopy to measure hysteresis and coercive voltage, with interpretation based on phase and amplitude signals.
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