研究目的
To study the growth of BiFeO3 thin film by RF magnetron sputtering for resistive switching effect and investigate the physical mechanism of resistive random access memory (RRAM).
研究成果
The BiFeO3/Nb:SrTiO3 heterostructure exhibits bipolar resistive switching with a resistance ratio over 100 and excellent retention, attributed to charge carrier trapping/detrapping via space-charge-limited conduction, providing insights for RRAM applications.
研究不足
The study is limited to room temperature measurements and specific sputtering conditions; the mechanism may not be fully generalizable, and further optimization of parameters could enhance performance.
1:Experimental Design and Method Selection:
The study used RF magnetron sputtering to deposit BiFeO3 thin films on Nb:SrTiO3 substrates at room temperature, followed by post-annealing to achieve crystallization. Electrical measurements were conducted to observe bipolar resistive switching.
2:Sample Selection and Data Sources:
Samples were prepared using (001)-oriented 0.7wt% Nb-doped SrTiO3 single crystal substrates. Data were obtained from X-ray diffraction, atomic force microscopy, and current-voltage measurements.
3:7wt% Nb-doped SrTiO3 single crystal substrates. Data were obtained from X-ray diffraction, atomic force microscopy, and current-voltage measurements. List of Experimental Equipment and Materials:
3. List of Experimental Equipment and Materials: Equipment includes RF magnetron sputtering system, X-ray diffractometer (D8 Advance, Bruker), atomic force microscope (Mutimode Ⅷ, Bruker), and semiconductor parameter analyzer (Agilent Technologies B1500A). Materials include Bi1.1FeO3 target, Pt and In electrodes.
4:1FeO3 target, Pt and In electrodes. Experimental Procedures and Operational Workflow:
4. Experimental Procedures and Operational Workflow: Films were deposited with specific parameters (base pressure 3.2×10-4 Pa, working pressure 0.83 Pa, RF power 65 W in Ar atmosphere), annealed at 600°C for 30 min in O2, and electrodes were deposited. Measurements involved sweeping voltages and recording J-V characteristics.
5:2×10-4 Pa, working pressure 83 Pa, RF power 65 W in Ar atmosphere), annealed at 600°C for 30 min in O2, and electrodes were deposited. Measurements involved sweeping voltages and recording J-V characteristics. Data Analysis Methods:
5. Data Analysis Methods: Data were analyzed using semi-logarithmic and double-logarithmic plots to determine conduction mechanisms, with statistical analysis of resistance ratios and retention times.
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X-ray diffractometer
D8 Advance
Bruker
Evaluate the crystalline quality of the BFO films
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Atomic force microscope
Mutimode Ⅷ
Bruker
Characterize the surface morphology
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Semiconductor parameter analyzer
B1500A
Agilent Technologies
Perform current-voltage measurements
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RF magnetron sputtering system
Deposit BiFeO3 thin films
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DC magnetron sputtering system
Deposit Pt top electrodes
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Tube furnace
Annealing samples
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