研究目的
To demonstrate electrostatic tuning and stabilization of optomechanical crystal cavities by integrating them with nanoelectromechanical systems (NEMS) for controlling optical resonance frequencies.
研究成果
The integration of NEMS actuators with optomechanical crystals enables effective electrostatic tuning and stabilization of optical resonances, with demonstrated wavelength shifts over four cavity linewidths and improved stability through feedback control. This approach facilitates long-term measurements and multi-domain interactions in optomechanics.
研究不足
The tuning range is limited compared to other NEMS/MEMS devices; trade-offs exist between tuning range and mechanical frequency; fabrication variations affect dimensions; optical coupling modifications may reduce mechanical quality factors.
1：Experimental Design and Method Selection:
The study integrates a Si3N4 slot-mode optomechanical crystal cavity with a NEMS actuator to control the displacement of a tuning beam. Finite element method (FEM) simulations were used for design and prediction of optical and mechanical behaviors.
2：Sample Selection and Data Sources:
Devices were fabricated in 250 nm thick stoichiometric Si3N4 on Si substrates. Samples included various gap sizes and electrode configurations.
3：List of Experimental Equipment and Materials:
Equipment includes a 980 nm external cavity tunable diode laser, fiber taper waveguide (FTW), RF probe, vector network analyzer (VNA), photodetector, proportional-integral-derivative (PID) controller, scanning electron microscope (SEM), and materials such as Si3N4, Au electrodes with Cr adhesion layer.
4：Experimental Procedures and Operational Workflow:
Fabrication involved electron-beam lithography, lift-off, reactive ion etching, and KOH release. Optical characterization was done at room temperature with laser coupling via FTW. DC and AC biases were applied to NEMS actuators, and optical spectra and mechanical responses were measured. Feedback control was implemented using a PID controller.
5：Data Analysis Methods:
Data were analyzed using Lorentzian fits for quality factors and resonance frequencies, FEM simulations for predictions, and theoretical fits for actuator behavior.
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