研究目的
Design and development of a novel piezoelectrically actuated dual-axis micro manipulator with an asymmetric compliant structure for applications in micro/nano assembly, measurement, manufacturing, and robotics, specifically for tasks like grasping and rotating tiny objects such as optical fibers.
研究成果
The developed dual-axis micro manipulator successfully achieves its design goals with high amplification ratios (11.12 for left part, 4.64 for right part), low output coupling (0.4% and 3.06%), and fine resolutions (0.15 μm position, 4 mN force). It demonstrates effective performance in grasping and rotating tasks, validated through analytical modeling and experimental tests. The novel GB-type mechanism enhances dynamic performance, and the asymmetric structure allows compact design with fewer actuators. Future work could focus on reducing input coupling and improving precision further for broader applications.
研究不足
The study may have limitations in terms of the specific materials and fabrication techniques used (e.g., AL7075-T651 and WEDM), which could affect generalizability. The input coupling ratio of 12.2% indicates some level of interference between axes, and position errors (1.4% for left part, 2.2% for right part) suggest room for improvement in precision. The force resolution of 4 mN might not be sufficient for ultra-sensitive applications. Additionally, the use of PI controllers may not fully compensate for nonlinearities like hysteresis in piezoelectric actuators.
1：Experimental Design and Method Selection:
The study involves designing a micro manipulator with an asymmetric compliant structure, using analytical modeling (PRB and MCM methods) and finite element analysis (FEA) for simulation. Experimental tests include open-loop and closed-loop control with PI controllers for position and force regulation.
2：Sample Selection and Data Sources:
The prototype is fabricated from AL7075-T651 using wire electro discharge machining (WEDM). Experiments use gold wires with a diameter of 85 μm and a flag for manipulation tasks.
3：List of Experimental Equipment and Materials:
Equipment includes laser displacement sensors (Keyence LK-H050), voltage control unit (THORLABS voltage amplifier, dSPACE DS1103 controller), PZTs (XP 5 × 5/18), strain gauge sensor, camera, and computer. Materials include AL7075-T651 for the manipulator.
4：Experimental Procedures and Operational Workflow:
Fabricate the manipulator via WEDM. Perform open-loop tests to measure displacement amplification and closed-loop tests with PI control for step responses and resolution measurements. Conduct grasping and rotating tasks on gold wires and a flag, capturing the process with a camera.
5：Data Analysis Methods:
Data is analyzed using analytical models (PRB and MCM), FEA simulations, and experimental measurements from sensors. Statistical analysis includes calculating amplification ratios, position and force resolutions, and control performance metrics like settling time and overshoot.
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