1：Experimental Design and Method Selection:

The study uses tunneling atomic force microscopy (AFM) to investigate resistive switching in ZrO2(Y) films with Au nanoparticles. The method involves cyclic current-voltage characteristic (CVC) measurements under optical illumination at the plasmon-resonance wavelength.

2：Sample Selection and Data Sources:

Samples are ultrathin ZrO2(Y) films (~4 nm thick) with embedded single-layer Au nanoparticle arrays (2–3 nm in size) grown on glass substrates with a conductive indium-tin-oxide (ITO) sublayer. Reference samples without nanoparticles are also used.

3：List of Experimental Equipment and Materials:

Equipment includes a Torr International MSS-3GS vacuum thin-film deposition system for sample preparation, a Varian Cary 6000i spectrophotometer for optical absorption spectroscopy, an Omicron UHV AFM/STM LF1 setup with NT MDT NSG-11 DCP AFM probes for AFM measurements, and a semiconductor laser for optical excitation. Materials include ZrO2–Y2O3 target, Au, glass substrates with ITO, and neutral light filters.

4：Experimental Procedures and Operational Workflow:

Samples are prepared via layerwise magnetron sputtering and annealing. AFM scanning is done in contact mode, with CVCs measured by sweeping voltage from -6 V to +6 V. Optical illumination is applied through the substrate using a laser at 660 nm wavelength, with intensity regulated by filters.

5：Data Analysis Methods:

Data analysis involves comparing CVCs with and without illumination, estimating temperature increases using thermal conductivity equations, and analyzing field emission using the Fowler-Nordheim mechanism.