研究目的
To synthesize uniform monolayer graphene films with controlled number of layers, overcoming the limitations of poor thickness uniformity on solid Cu and difficulty in forming continuous films on liquid Cu.
研究成果
The two-step CVD method enables rapid transformation of non-uniform graphene films on solid Cu into continuously uniform monolayer graphene films on liquid Cu within 3 min. The resulting films exhibit larger grain size, higher quality, improved optical and electrical properties, and superior performance in OLED applications. The mechanism involves etching-‘self-aligning’-coalescence processes, as revealed by carbon isotope labeling. This approach provides a new strategy for growing high-quality uniform monolayer graphene and insights for other 2D materials.
研究不足
The method requires continuous graphene film grown on S-Cu as a prerequisite; discontinuous initial films do not form uniform monolayers. Treatment time on L-Cu must be precisely controlled (3 min optimal); shorter times leave adlayers, longer times cause etching. Continuous CH4 supply is essential; stopping it leads to extensive etching and exposed Cu areas. The process is specific to Cu substrates and may not directly apply to other materials without optimization.
1:Experimental Design and Method Selection:
A two-step CVD method was designed. Step 1: Growth of non-uniform continuous graphene films on solid Cu (S-Cu) foil at 1,070 °C under H2 and Ar flow with CH4 as carbon source. Step 2: Transformation on liquid Cu (L-Cu) by raising temperature above the melting point of Cu (1,084 °C) to 1,090 °C for 3 min under continuous CH4 supply. The method leverages the uniform surface of L-Cu to achieve etching-‘self-aligning’-coalescence processes.
2:Sample Selection and Data Sources:
A 25-μm-thick Cu foil (99.999 wt.% purity) placed on a 50-μm-thick W foil (99.5 wt.% purity) was used as the substrate. Graphene films were characterized after transfer to SiO2/Si substrates, PET, or TEM grids.
3:999 wt.% purity) placed on a 50-μm-thick W foil (5 wt.% purity) was used as the substrate. Graphene films were characterized after transfer to SiO2/Si substrates, PET, or TEM grids. List of Experimental Equipment and Materials:
3. List of Experimental Equipment and Materials: CVD system with fused-silica reaction tube, Cu foil, W foil, CH4, H2, Ar, PMMA, (NH4)2S2O8, acetone, ethanol, nitrogen, TEM grids, SiO2/Si wafers, PET.
4:Experimental Procedures and Operational Workflow:
(1) Heat S-Cu substrate to 1,070 °C under H2 (200 sccm) and Ar (500 sccm). (2) Introduce CH4 (1.5 sccm) for 20 min to grow graphene on S-Cu. (3) Raise temperature to 1,090 °C in 2 min to melt Cu, maintain for 3 min on L-Cu. (4) Cool to room temperature under Ar (100 sccm). Transfer involved spin-coating PMMA, etching Cu with (NH4)2S2O8, and cleaning with acetone.
5:5 sccm) for 20 min to grow graphene on S-Cu. (3) Raise temperature to 1,090 °C in 2 min to melt Cu, maintain for 3 min on L-Cu. (4) Cool to room temperature under Ar (100 sccm). Transfer involved spin-coating PMMA, etching Cu with (NH4)2S2O8, and cleaning with acetone. Data Analysis Methods:
5. Data Analysis Methods: Characterization using SEM, optical microscopy, Raman spectroscopy, AFM, HRTEM, SAED, sheet resistance measurements, transmittance measurements, FET electrical properties, and OLED performance analysis.
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AFM
Bruker Multimode 8
Bruker
Measurement of graphene film roughness
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TEM
FEI Tecnai T12
FEI
Selective area electron diffraction for grain structure analysis
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HRTEM
FEI Tecnai G2 F20
FEI
High-resolution imaging of graphene lattice structure
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Aberration-corrected TEM
FEI Titan Cube Themis G2 300
FEI
Detailed structural characterization of graphene
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UV-vis-NIR spectrometer
Agilent Model Cary 5E
Agilent
Measurement of transmittance of graphene films
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Semiconductor parameter analyzer
4155C Semiconductor Parameter Analyzer
Agilent
Electrical characterization of FET devices
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Source measurement units
Keithley 2450
Keithley
Current-brightness-voltage characterization of OLEDs
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Cu foil
25-μm-thick
Substrate for graphene growth in CVD process
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W foil
50-μm-thick
Alfa Aesar China Co., Ltd
Support for Cu foil to enable liquid Cu formation
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SEM
Nova NanoSEM 430
Characterization of graphene morphology and coverage
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Raman spectrometer
LabRAM HR800
Analysis of graphene structure, uniformity, and quality
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4-probe resistivity measurement system
RTS-9
Measurement of sheet resistance of graphene films
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Photometer
PR-655
Photo Research, Inc.
Luminance measurement for OLED characterization
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Optical microscope
Nikon LV100D
Nikon
Imaging of graphene films on substrates
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