研究目的
To enhance the photoresponse of silicon photodiodes in the near-infrared (NIR) and short-wave infrared (SWIR) region using hourglass-shaped silicon nanowires with whispering-gallery-mode resonances.
研究成果
The hourglass-shaped SiNW photodiodes demonstrated enhanced photoresponse in the NIR–SWIR region, with responsivity and external quantum efficiency superior to existing silicon photodiodes and comparable to commercial InGaAs photodiodes. The devices were successfully applied in a heart-rate measurement system, showing performance comparable to commercial setups.
研究不足
The study focuses on the NIR–SWIR region and may not be directly applicable to other wavelength ranges. The fabrication process, while conventional, requires precise control over etching conditions to achieve the desired nanowire shapes.
1:Experimental Design and Method Selection:
The study involved designing hourglass-shaped silicon nanowires (SiNWs) with whispering gallery mode (WGM) resonances to enhance NIR–SWIR detection. The methodology included conventional semiconductor processing for device fabrication and 3D finite-difference time-domain (FDTD) simulations for optical property analysis.
2:Sample Selection and Data Sources:
A 200-mm Si wafer (p-type, 8–12 Ω cm) was used as the starting material. The fabrication process included defining hourglass-shaped SiNW arrays using standard i-line stepper lithography and single-step inductively coupled plasma reactive ion etching (ICP-RIE).
3:List of Experimental Equipment and Materials:
Equipment included a semiconductor analyzer (4156 C, Agilent), a monochromator (74025, Newport), a 500 W xenon lamp, and a spectrophotometer (UV-3600 Plus, Shimadzu). Materials included a 200-mm Si wafer, SiO2 for hard mask, and Ti/Al for electrodes.
4:Experimental Procedures and Operational Workflow:
The fabrication process involved boron ion implantation, SiO2 layer growth, nanodot pattern definition, Si etching, n-type Si film deposition, electrode formation, and device characterization.
5:Data Analysis Methods:
The spectral response (Rλ and EQE) of the photodiodes was measured, and optical simulations were performed using 3D FDTD to analyze optical generation rates and electric field distributions.
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