研究目的
Investigating the monolithic integration of lattice-matched Ga(NAsP)-based laser structures on CMOS-compatible Si (001) wafers for Si-photonics applications.
研究成果
The research demonstrates the potential of lattice-matched Ga(NAsP)-based laser material on Si (001) substrates for monolithic integration into Si-photonics applications, avoiding the formation of misfit and threading dislocations from the beginning. The study highlights the structural, electrical, and optoelectronic properties of this novel material system and its integration into the standard CMOS-production process.
研究不足
The study focuses on the integration of Ga(NAsP)-based laser structures on Si (001) substrates, with potential challenges in achieving long lifetime laser devices due to threading dislocations in heteroepitaxial approaches.
1:Experimental Design and Method Selection:
The study involves the epitaxial growth of Ga(NAsP)-based hetero- and laser structures on (001) Si by metal organic vapor phase epitaxy (MOVPE). The structural, electrical, and optoelectronic properties of these structures are analyzed.
2:Sample Selection and Data Sources:
The research uses CMOS-compatible Si (001) wafer orientations for the epitaxial growth.
3:List of Experimental Equipment and Materials:
The study utilizes research MOVPE equipment (Aix 200-gas foil rotation reactor from Aixtron) and a production-type MOVPE-twin reactor system for deposition on 300 mm Si (001) wafers.
4:Experimental Procedures and Operational Workflow:
The process includes the deposition of GaP-on-Si (001) templates, followed by the realization of Ga(NAsP)/GaP/(BGa)(AsP)-heterostructures. The structural characteristics are analyzed by HR-XRD, AFM, and (S)TEM.
5:Data Analysis Methods:
The analysis involves high-resolution X-ray diffraction (HR-XRD), atomic force microscopy (AFM), and scanning transmission electron microscopy (STEM) for structural analysis, and photoluminescence (PL) and photoluminescence excitation spectroscopy (PLE) for optoelectronic properties.
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