研究目的
Investigating the effects of material degradation on the electrical and optical characteristics of surface dielectric barrier discharge (SDBD) plasma generated on three different dielectrics (multi-layered polyimide, quartz, and alumina).
研究成果
The study concludes that material degradation significantly affects the electrical and optical characteristics of SDBD plasma. Polyimide-based devices exhibit both dielectric degradation and electrode erosion, leading to increased electron temperature and gas temperature over time. Quartz and alumina-based devices show only electrode erosion, resulting in decreased electron temperature but increased gas temperature. The distribution of electron temperature is more indicative of discharge uniformity changes during plasma processing.
研究不足
The study focuses on three specific dielectric materials and their degradation under plasma discharge. The findings may not be directly applicable to other materials or under different discharge conditions.
1：Experimental Design and Method Selection:
The study involved fabricating screen-printed electrodes on three different dielectrics and generating SDBD plasma using AC power. Electrical and optical characteristics were analyzed using optical emission spectra (OES) and Lissajous figure analysis.
2：Sample Selection and Data Sources:
Three dielectrics with different relative permittivities were used: multi-layered polyimide, quartz, and alumina. Discharge images, surface morphologies, and electrical measurements were collected.
3：List of Experimental Equipment and Materials:
Digital camera (Nikon D7000), electron microscope (JT-1600A), scanning electron microscope (SEM, Zeiss Supra55), digital microscope (KH-8700), high voltage probe (Tektronix P6015A), oscilloscope (Tektronix, DPO4014B), optical fiber spectrometer (Avantes 2048).
4：8). Experimental Procedures and Operational Workflow:
4. Experimental Procedures and Operational Workflow: The devices were subjected to plasma discharge aging tests under controlled conditions. Discharge images and surface morphologies were captured at different aging times. Electrical measurements were conducted to analyze power consumption and transported charge.
5：Data Analysis Methods:
The consumed discharge energy per cycle was calculated from Lissajous figures. Plasma temperatures were calculated from OES data using line-ratio techniques.
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Scanning electron microscope
Supra55
Zeiss
Capturing detailed surface morphologies
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High voltage probe
P6015A
Tektronix
Measuring applied voltage
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Oscilloscope
DPO4014B
Tektronix
Displaying and recording traces of the voltage across the plasma device and the capacitor probe
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Optical fiber spectrometer
2048
Avantes
Collecting optical emission spectra
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Digital camera
D7000
Nikon
Capturing discharge images
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Electron microscope
JT-1600A
Capturing surface morphologies
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Digital microscope
KH-8700
Capturing three-dimensional structures around the electrode edge
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