研究目的
To investigate the effect of hydrogen plasma treatment on the photoconductive properties of SiO2 matrix containing SiGe nanoparticles, aiming to increase photocurrent intensity by passivating defects and dangling bonds.
研究成果
Hydrogen plasma treatment at room temperature significantly increases photocurrent intensity in SiGe nanoparticle structures by passivating dangling bonds and defects. This method enhances photoconductive device efficiency without surface damage, but further research is needed on pressure effects and extended treatment durations.
研究不足
The study did not involve external heating during hydrogenation, which may limit the extent of passivation. The effect of pressure on hydrogenation efficiency requires further investigation, as conflicting results exist in literature. Long-term continuous plasma treatment effects were not explored.
1：Experimental Design and Method Selection:
Multilayer structures of SiO2 and SiGe were deposited on Si (001) substrates using magnetron sputtering techniques. Hydrogen plasma treatment was applied in cycles to study its effect on photoconductivity.
2：Sample Selection and Data Sources:
Samples consisted of SiO2 buffer layer and SiO2/SiGe/SiO2 films with specific thicknesses. Photocurrent measurements were taken before and after hydrogenation.
3：List of Experimental Equipment and Materials:
Advanced Energy MDX500 power supply, SPIK1000A pulse unit, Melec GmbH pulse unit, ADL GS30 DC power supply, CESAR? 136 rf power generator, quartz tube, copper inductive coil, tungsten-halogen lamp, Al contacts, color-changing temperature stripes.
4：Experimental Procedures and Operational Workflow:
Deposition of layers, hydrogenation in H2/Ar plasma at room temperature in 10-minute cycles, photocurrent measurement under illumination and dark conditions, data normalization with light source spectrum.
5：Data Analysis Methods:
Analysis of photocurrent spectra, identification of peaks attributed to strain, nanocrystals, and surface photo-voltage, comparison of intensity changes post-hydrogenation.
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