研究目的
Investigating the use of a novel showerhead-based CVD tool for the fabrication of perovskite films to achieve stoichiometric compositions without residues, aiming for scalable and efficient solar cell applications.
研究成果
The developed showerhead-assisted CVD tool allows for the adjustable stoichiometry of perovskite layers by controlling the molar ratio of sublimated precursors. A molar ratio of 1.3 was found ideal for achieving stoichiometric perovskite without residues. Despite similar crystal quality to spin-coated references, the CVD films' high porosity necessitates further optimization for improved solar cell performance.
研究不足
The high degree of porosity in the CVD films was identified as detrimental for solar cell performance, leading to dominant recombination losses and a large series resistance. Optimization of the perovskite film morphology by suppressing porosity and enlarging grain size is necessary for higher power conversion efficiencies.
1：Experimental Design and Method Selection:
A novel showerhead-based CVD tool was developed for the deposition of perovskite films by simultaneous delivery of precursors from the gas phase. The process was designed to obtain stoichiometric methylammonium lead iodide (MAPbI3) films by adjusting the individual precursor deposition rates.
2：Sample Selection and Data Sources:
The study employed the organo-halide compound MAI and the metal halide PbI2 to obtain MAPbI3 perovskite layers on a typical solar cell anode stack.
3：List of Experimental Equipment and Materials:
The setup included Creaphys thermal evaporators for precursor sublimation, a quartz crystal microbalance (QCM) for deposition rate determination, and SEM, XRD, and optical transmission measurements for characterization.
4：Experimental Procedures and Operational Workflow:
Precursors were thermally sublimated at specific temperatures, with the N2 carrier gas flow set to 500 sccm and the showerhead temperature to 350 °C. The substrate temperature was controlled at 120 °C for condensation and reaction of the precursors.
5：Data Analysis Methods:
The impact of the molar ratio between MAI and PbI2 on layer crystallinity, morphology, and optical properties was analyzed using SEM, XRD, and optical transmission measurements.
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